Search Results - robert+brainard

2 Results Sort By:
Chain-Scission Polyester PAG-Polymers Disclosure IV
A high-performance photoresist that improves extreme ultraviolet image resolution, line width roughness, and sensitivity. Background: Extreme ultraviolet (EUV) imaging is an optical technology that enables smaller feature sizes in semiconductor chips, which pushes device performance forward. It works by first producing a pattern by exposing a reflective...
Published: 9/20/2024   |   Inventor(s): Robert Brainard
Keywords(s): Technologies
Category(s): Campus > SUNY Polytechnic Institute, Technology Classifications > Electronics, Technology Classifications > Energy, Technology Classifications > Imaging, Technology Classifications > Materials and Chemicals, Technology Classifications > Optics and Photonics
Acid Amplifiers for EUV Photoresists
An acid amplifier system that improves the capabilities of extreme ultraviolet imaging (13.5 nm) and electron-beam lithography. Background: Extreme ultraviolet (EUV) imaging is an optical technology that enables smaller feature sizes in semiconductor chips, which pushes device performance forward. It works by first producing a pattern by exposing...
Published: 9/20/2024   |   Inventor(s): Robert Brainard
Keywords(s): Technologies
Category(s): Campus > SUNY Polytechnic Institute, Technology Classifications > Electronics, Technology Classifications > Imaging, Technology Classifications > Engineering, Technology Classifications > Materials and Chemicals, Technology Classifications > Optics and Photonics