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Search Results - yashdeep+khopkar
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System and Methods for Detecting, Capturing, and Measuring Nanoparticles
Speeds the semiconductor manufacturing process by detecting particles smaller than 20nm before they have adhered to the silicon wafer. Background: The conventional method for of detecting particles during the semiconductor manufacturing process occurs only after the particles have adhered to silicon wafer. While that approach is easier because...
Published: 4/1/2025
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Inventor(s):
Gregory Denbeaux
,
Yashdeep Khopkar
Keywords(s):
defect-tolerant semiconductor
,
Technologies
Category(s):
Technology Classifications > Nanotechnology
,
Campus
,
Campus > SUNY Polytechnic Institute