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Low Temperature Epitaxial Growth of Quaternary Wide Bandgap Semiconductors
The advent of epitaxial techniques for growing thin films has allowed for the growth of unnatural, metastable structures having properties previously unattainable in equilibrium systems. Specifically, quaternary compounds are of great interest for microelectronic and optoelectronic devices due to expectations that these materials will exhibit...
Published: 2/23/2023   |   Inventor(s): John Kouvetakis, Ignatius Tsong, Radek Roucka, John Tolle
Keywords(s): Materials
Category(s): Physical Science, Semiconductors, Materials & Processes