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Optical Fiber Reactor for Gas Treatment of Nitrogen-Oxide
Background Nitrogen oxides (NOx) as well as nitrous oxide (N2O) have been identified as pollutants of concern in the semiconductor manufacturing industry. While there has been successful implementation of abatement systems to control the emissions of nitrogen oxides, some facilities require further removal to comply with new regulations and meet sustainability...
Published: 12/16/2024   |   Inventor(s): Pierre Herckes, Paul Westerhoff, Matthew Fraser
Keywords(s):  
Category(s): Physical Science, Semiconductors, Materials & Processes, Energy & Power, Environmental