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Wave-Interrogated Near-Field Array System and Method for Detection of Subwavelength Scale Anomalies
Anomalies on semiconductor substrates, such as process contaminants, post-polishing substrate fragments, or voids, must be accurately located and identified in order to obtain the cleanliness required by the next generation of integrated microcircuits. While technological advances have reduced the critical anomaly size to less than 80 nm, existing conventional...
Published: 2/23/2023   |   Inventor(s): Rodolfo Rudy Diaz, Michael Watts
Keywords(s): Inspection, Instrumentation
Category(s): Physical Science, Semiconductors, Materials & Processes