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Deuterized Low-K Dielectric Materials for TDDB Mitigation
Simple, scalable and inexpensive process to replace the hydrogen in low-k dielectrics with deuterium to improve semiconductor performance. Background: Low-k dielectrics are a class of materials used in the manufacture of nanoscale semiconductor devices. The problem with low-k dielectrics is that they are susceptible to a phenomenon known as time dependent...
Published: 4/3/2025
|
Inventor(s):
James Lloyd
,
Niaz Mahmud
Keywords(s):
nanotechnology
,
semiconductors
Category(s):
Technology Classifications > Nanotechnology
,
Campus > SUNY Polytechnic Institute