Inteum Company
Links
seedsprint
Visible Legacy
RSS
News & Resources
Inteum Company News
Inteum Library
Subscribe
Search Results - computer+%3e+algorithms+and+software+methods
1
Results
Sort By:
Published Date
Updated Date
Title
ID
Descending
Ascending
Rapid optical metrology of critical dimensions of large-area nanostructure arrays with complex patterns
Background Scatterometry-based metrology has the capability to perform high-throughput inspection of geometric characteristics of large-area nanopatterned surfaces. It utilizes physics-based dependencies between reflectance of light scattered from nanopatterned surfaces for pre-defined set of wavelengths and Critical Dimensions (CDs) of such nanopatterns. Current...
Published: 8/16/2024
|
Inventor(s):
Dragan Djurdjanovic
,
Ramin Sabbagh
Keywords(s):
Category(s):
Physical sciences > Semiconductor
,
Physical sciences > Testing equipment
,
Computer > Algorithms and software methods
,
Computer > AI/ML