Brief Description: A method, comprising: etching, in a first surface of a substrate having first and second surfaces spaced from one another along a transverse direction, a plurality of delivery channels such that a delivery channel has a first cross-sectional dimension along a first plane that is perpendicular to the transverse direction; forming an oxide layer on the first surface of the substrate and on inner surfaces of the delivery channels; etching vias in the second surface of the substrate so each via is aligned with a respective one of the delivery channels along the transverse direction; etching droplet generators in the second surface of the substrate such that each droplet generator is in fluid communication with at least one of vias; removing the oxide layer from the first surface of the substrate and the inner surfaces of the delivery channels to place the vias in fluid communication with the delivery channels. Image: Caption: Reference Media Title: Reference Media: Intellectual Property Title: Intellectual Property: Intellectual Property: US 2025/0153165 A1 Docket Number: Docket#: 18-8558