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Carving Probes Metrology
Background 2D stacked semiconductors as channel materials are being actively considered for high volume manufacturing (HVM). However, there is a need for developing methods for vetting important physical characteristics that affect devices. These characteristics include layer counts, contaminations, interface control, stacking order and orientation,...
Published: 5/8/2024   |   Inventor(s): Umberto Celano
Keywords(s):  
Category(s): Energy & Power, Advanced Materials/Nanotechnology, Physical Science, Semiconductors, Materials & Processes