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Low-Temperature Synthesis of Thin Films with Tailored Grain Size, Texture, and Phase Composition

Background Metallic films have a broad range of applications in electronics, optoelectronics, plasmonics, catalysis, and MEMS sensors and actuators. In many of these applications it is highly desirable to control the microstructure (size and spatial distribution of grains, texture, and phase composition) of the films since the microstructure largely...

Published: 2/23/2023 | Inventor(s): Jagannathan Rajagopalan, Paul Rasmussen

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Category(s): Physical Science, Advanced Materials/Nanotechnology, Manufacturing/Construction/Mechanical, Semiconductors, Materials & Processes