Search Results - mark+pallay

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Portable High-Resolution AFM with Electrostatic Levitation
This invention combines electrostatic levitation actuators with triboelectric nanogenerators to enable self-powered shock and vibration sensors. By directly converting motion to voltage and voltage to motion, it eliminates complex control systems, delivering compact, CMOS-compatible sensors for impact detection, fall alarms, and environmental monitoring....
Published: 9/12/2025   |   Inventor(s): Shahrzad Towfighian, Ronald Miles, Mark Pallay
Keywords(s):  
Category(s): Campus > Binghamton University, Technology Classifications > Engineering, Technology Classifications > Electronics
Levitating MEMS Switch
Microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation Technology Overview: A microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation. The approach is of great utility for any MEMS component that has to recover easily from pull-in,...
Published: 8/21/2025   |   Inventor(s): Shahrzad Towfighian, Mark Pallay
Keywords(s):  
Category(s): Campus > Binghamton University, Technology Classifications > Electronics, Technology Classifications > Engineering