This invention combines electrostatic levitation actuators with triboelectric nanogenerators to enable self-powered shock and vibration sensors. By directly converting motion to voltage and voltage to motion, it eliminates complex control systems, delivering compact, CMOS-compatible sensors for impact detection, fall alarms, and environmental monitoring.
Background: Conventional shock sensors, such as those used in automotive airbag deployment, rely on electronic processing units to interpret signals and trigger a response. These systems require complex circuitry, increase costs, and introduce risks of software or component failures. Existing sensing platforms also depend on external power, reducing reliability in critical safety applications. A solution is needed that can provide reliable, battery-free sensing by directly linking mechanical shock to electrical and mechanical response without complicated processing units.
Technology Overview: This system integrates electrostatic levitation actuators with triboelectric nanogenerators to achieve self-powered sensing and actuation. The electrostatic actuator provides stable, linear z-displacements of 20–30 microns, overcoming pull-in collapse and nonlinear limits of traditional designs. A DC bias allows real-time tuning of resonant frequency, while the triboelectric nanogenerators convert mechanical motion into electrical signals and provide supplemental power. This dual-transducer system enables direct operation of microswitches when motion exceeds a threshold, eliminating the need for external power or signal processors. CMOS compatibility ensures low-cost fabrication and easy integration into compact platforms.
Advantages: • Large, stable displacements (20–30 µm) for reliable actuation • Real-time tunable resonant frequency with DC bias • Self-powered operation via triboelectric nanogenerators • Direct sensing-to-actuation without signal processing units • Compact, portable design with microwatt-level power needs • Eliminates pull-in collapse for broader actuation range • CMOS-compatible for scalable, cost-effective integration • Combines sensing and actuation in one platform
Applications: • Automotive airbag deployment systems • Self-powered fall detection alarms for elderly care • Vibration monitoring for remote industrial machinery • Environmental monitoring sensors for impact or seismic activity • Portable, low-maintenance safety and security systems
Intellectual Property Summary: • US Patent 12,091,313 – Utility Application 17/000,634, Filed August 24, 2020, Granted September 17, 2024 • US Publication US20210061648A1 – Published August 29, 2024
Stage of Development: Prototype and Patented – Validated for self-powered shock and vibration sensing with demonstrated integration of levitation actuators and triboelectric nanogenerators. TRL ~5.
Licensing Status: This technology is available for licensing.
Licensing Potential: Ideal for automotive, healthcare, and industrial markets requiring compact, reliable, and maintenance-free shock and vibration sensors that operate without external power or complex processing.
Additional Information: Experimental validation data, displacement tuning results, and triboelectric integration studies available upon request.
Inventors: Shahrzad Towfighian, Ronald Miles, Mark Pallay