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Search Results - keith+wong
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Site-Specific Synthesis of 2D TMDs for High-Performance Nanoelectronic Devices
A lithographically defined, transfer-free CVD process enables site-specific growth of MoS₂ directly on CMOS-compatible SiO₂/Si substrates using patterned MoO₃ as both precursor and high-k dielectric. The approach delivers tunable crystallinity, improved interface quality, and enhanced FET performance while eliminating post-growth transfer and etching...
Published: 2/23/2026
|
Inventor(s):
Huamin Li
,
Fei Yao
,
Gabriel Lee
,
Keith Wong
,
Ajay Yadav
,
Chu-Te Chen
,
Anthony Cabanillas
Keywords(s):
Materials & Chemicals
,
Semiconductor and Microprocessing
,
Technologies
Category(s):
Campus > University at Buffalo
,
Technology Classifications > Electronics
,
Technology Classifications > Nanotechnology
,
Technology Classifications > Materials and Chemicals