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Search Results - johar+pourghader
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Ultra-Sensitive Single-Layer MEMS Capacitive Platform with Repulsive Softening
This invention introduces a MEMS capacitive platform that cancels bias-induced stiffening with co-planar “repulsive” electrodes, boosting displacement response by over 6× without increasing noise, enabling simpler, smaller, and more sensitive microphones and sensors. Background: Capacitive MEMS sensors and actuators require a DC...
Published: 10/3/2025
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Inventor(s):
Johar Pourghader
,
Ronald Miles
Keywords(s):
Technologies
Category(s):
Campus > Binghamton University