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Fabrication of 3-d ion optics assemblies by metallization of non-conductive substrates
This invention includes, in one embodiment, a method to simplify the fabrication and assembly of cylindrical ion traps (CITs) using new materials and processes. Accordingly, a CIT was made from Low Temperature Co-fired Ceramics (LTCC), used in semi-conductor industry as a packaging material and physical MEMS and RF (MEMS) devices. The invention seemed...
Published: 8/27/2023   |   Inventor(s): Ashish Chaudhary, Friso van Amerom, George Steimle, R. Short, Shekhar Bhansali
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Category(s): Technology Classifications > Electronics, Technology Classifications > Electronics > Electronics Laser