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Search Results - adnan+zaman
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Frequency Alteration and Performance Enhancement of a Resonant MEMS Device and a Resonant MEMS Array
Advantages Improves resonator precision and quality using localized Joule heating Enables post-fabrication tuning without redesign or full re-manufacture Enhances performance by lowering motional resistance and boosting Q factor Works with a wide range of MEMS materials and device shapes Summary MEMS resonators are widely used in precision...
Published: 5/20/2025
|
Inventor(s):
Ugur Guneroglu
,
Jing Wang
,
Adnan Zaman
Keywords(s):
Electronics
,
Piezoelectric
,
Semiconductors
Category(s):
Technology Classifications > Engineering > Electrical Engineering
,
Technology Classifications > Engineering > Mechanical Engineering