XUV Photonic Integrated Circuits with Vacuum Guiding

This invention is a novel approach to developing photonic integrated circuits operating in extreme ultraviolet wavelength (XUV) range. This technology enables the fabrication of XUV components, including waveguides, photonic crystal cavities, or resonators while using vacuum as the guiding medium. 

Background: 
Currently, there is a critical challenge in XUV photonics concerned with substantial material absorption and loss at extreme ultraviolet wavelengths. Most materials exhibit a negative part of the refractive index which makes them unsuitable for traditional waveguides. Vacuum guiding offers a higher index and is intrinsically lossless, making it a solution to these challenges. 

Applications: 

• Chip XUV spectroscopy
• XUV photonics
• Attosecond science 
• Nonlinear optics
• High harmonic generation
• Lithography

Advantages: 

• Less losses at extreme ultraviolet wavelengths 
• Less material absorption at XUV wavelengths