This invention describes a novel photonic sensor based on a suspended membrane and a substrate that supports high-Q optical resonances sensitive to nanometer-scale membrane deflections. The technology exploits mechanically induced modulation of optical resonance conditions (such as guided-mode resonance, bound states in the continuum, and high contrast gratings) by controlling the vertical separation between a membrane and substrate. This allows for accurate alignment of components used in manufacturing semiconductor devices without relying on on-chip photodetectors. Background: In recent years, photonic crystal and membrane-based devices have emerged as a powerful platform for precision sensing, owing to their ability to confine and manipulate light within extremely small volumes. The strong interaction between light and matter in these systems enables resonance shifts in response to environmental or mechanical changes, making them highly sensitive to pressure, force, refractive index, and acoustic signals. Advances in nanofabrication, particularly in suspended and flexible membrane structures, have further enhanced optical confinement and mechanical tunability. These developments have opened new opportunities for highly miniaturized, integrable, and low-power optical sensors with performance surpassing many conventional electronic counterparts. Applications:
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