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Sapphire-Supported Substrates for Low-Noise Nanopore Sensing
Case ID:
M20-022L
Web Published:
8/27/2025
Solid-state nanopores are attractive because of their low cost and broad potential utility from single-molecule bioanalytical sensing to diagnostics and sequencing of DNA and protein molecules. Unfortunately, conventional use of conductive silicon substrates results in high capacitive noise, significantly limiting sensing accuracy and recording speed. Various efforts have been explored to design and manufacture low-noise nanopore devices, such as demoting recording bandwidths, using alternative substrates, or slowing down translocation speed, however, these approaches have still faced a number of limitations.
Researchers at Arizona State University have developed novel methods for fabricating sapphire-supported nanopore membranes to promote low-noise nanopore sensing. The substrate insulation drastically minimizes conductance-based capacitance, and the fabrication method allows for controlled membrane dimensions to improve the recording bandwidth by more than one order of magnitude. These nanopores enable sensing at microsecond speed with a signal-to-noise ratio of 21. The manufacturability of the sapphire-supported nanopores makes them competitive with conventional nanopore chips on the market. Additionally, the membranes could also be used to create MEMS devices by adding further components.
This nanopore sensor and fabrication methods present a manufacturable nanoelectronics platform feasible for high-speed, low-cost and low-noise sensing of a variety of biomolecules.
Potential Applications
Bioanalytical sensor
DNA and protein sequencing
Diagnostics
Molecular interaction studies
MEMS applications
Benefits and Advantages
The chip capacitance can be reduced by orders of magnitude
Significantly reduces the background high-frequency electrical noise and improves high-bandwidth sensing
Favorable for fast circuit response for electrical or optical methods to form nanopores in dielectric membranes
Batch-processing compatible to enable high-throughput and low-cost production that is critical to device implementation
The single-crystalline and insulating (bandgap ~10 eV) nature of sapphire can suppress leakage current and photoluminescence background for high DNA signal integrity, feasible for both low-noise electrical and optical sensing
Scalable formation of small membranes (<25 um) with a size deviation of less than 7 um over two 2-inch wafers
For more information about this opportunity, please see
Xia et al – Biosens Bioelectron - 2021
Xia et al – ACS Appl Mater Interfaces - 2023
For more information about the inventor(s) and their research, please see
Dr. Wang's departmental webpage
Patent Information:
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Direct Link:
https://canberra-ip.technologypublisher.com/tech/Sapphire-Supported_Substrate s_for_Low-Noise_Nanopore_Sensing
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For Information, Contact:
Jovan Heusser
Director of Licensing and Business Development
Skysong Innovations
jovan.heusser@skysonginnovations.com