Active vibration cancellation and control for scanning probe microscopy

Demonstration of filtering techniques used for both ground and acoustic noise 


Invention Summary:

Scanning Probe Microscopes (SPMs) are often bulky due to the need for passive noise isolation. Active noise cancellation techniques can alleviate some of the distortion, but still struggle with acoustic noise. 

Rutgers researchers have created a suite of techniques to actively reduce extraneous vibrations during a scanning probe microscope (SPM) measurement, and/or filter the distortions caused by such probe vibrations in the SPM images obtained by post-processing. This system comprises of sensors that measure the ground and probe vibrations, and use that information to filter out noise using model-based filtering techniques as well as enhance the signal to noise ratio with a Wiener filter. This is then integrated with a data-driven dictionary-based filtering approach to remove SPM image distortion caused by acoustic noise from unknown locations. The location of the noise source is estimated by a time-delay measurement method. An acoustic-dynamics modulator minimizes the image distortion by minimizing the coherence between the acoustic noise and the residual acoustic-caused image distortion through gradient-based optimization. This post-processing can eliminate a significant amount of the acoustic noise. Together, these techniques reduce the need for bulky passive noise cancellation systems, potentially saving researchers thousands on passive noise cancellation equipment.  

Market Applications:

  • University Laboratories 

  • Scanning Probe Microscopy 

  • Electronics Manufacturing 

  • Pharmaceutical Companies 

Advantages:

  • Primarily software based, resulting in low cost 

  • Improves accuracy in presence of both acoustic and ground-based noise 

  • Reduce passive noise cancellation costs by 10-fold 

  • Allows for post-process image improvement 

Publications: •    Chen, Jiarong & Zou, Qingze. (2022). Data-driven Dynamics-based Optimal Filtering of Acoustic Noise at Arbitrary Location in Atomic Force Microscope Imaging. Ultramicroscopy. 242. 113614. 10.1016/j.ultramic.2022.113614.

Intellectual Property & Development Status: Provisional application filed. Patent pending. Available for licensing and/or research collaboration. For any business development and other collaborative partnerships, contact:  marketingbd@research.rutgers.edu

Patent Information: