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Non-Invasive Metrology Tool for Wafers, Semiconductor Devices and MEMS
Resolves Depth and Angles to Deliver Precise MeasurementsThis tool is a type of interferometer that non-invasively measures wafers, layers in semiconductor devices and microelectromechanical systems (MEMS). Used in a wide range of computer products, MEMS are small electric-powered machines 100 microns or less in length. Available interferometers, used...
Published: 9/4/2024   |   Inventor(s): Jian Ge, Xiaoke Wan
Keywords(s): Bulk refractive Index Measurement, Low Coherence Interferometer, simultaneous refractive index and thickness m, Wafer Thickness
Category(s): Technology Classifications > Engineering > Instrumentation-Sensors-Photonics