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Diamond On Nanopatterned Substrates
Summary UCLA researchers in the Department of Materials Science and Engineering have developed a nanofabrication method for improving the thermal properties of polycrystalline diamond films grown by chemical vapor deposition. Background Synthetic polycrystalline diamond grown by chemical vapor deposition (CVD) is used to thermally manage high power...
Published: 7/19/2023   |   Inventor(s): Mark Goorsky, Yekan Wang, Tingyu Bai
Keywords(s): Electronics & Semiconductors
Category(s): Electrical > Electronics & Semiconductors, Materials > Fabrication Technologies