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SILICON NITRIDE WAVEGUIDE
COUPLED PHOTODIODE
RPI ID: 2020-084-401 Innovation Summary: A
silicon nitride waveguide
is integrated with a photodiode to enhance optical signal detection in photonic circuits. The design enables efficient coupling of light from the waveguide into the photodiode, improving responsivity and bandwidth. It supports CMOS-compatible fabrication and is suitable for high-speed...
Published: 3/10/2026
|
Inventor(s):
Mona Hella
,
Robert, Jr. Karlicek
,
Asif Chowdhury
Keywords(s):
avalanche photodiodes
,
photodiode
,
silicon nitride waveguide
,
silicon waveguide
Category(s):
Nanotechnology and Advanced Materials