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Search Results - sarav+bharat+jhaveri
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Process for Forming Patterned Metal Layers Using a Polymer as a Lift-Off Layer
The present invention describes, generally, a method of forming a patterned structure with dimensions spanning from 5 nanometers to the microscale (microns or millimeters) by means of imprint lithography in conjunction with a polymer film as a lift-off layer. DESCRIPTIONADVANTAGES The current invention describes a significant new advance in the fabrication...
Published: 8/8/2023
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Inventor(s):
Kenneth Raymond Carter
,
Sarav Bharat Jhaveri
Keywords(s):
Category(s):
Material science