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Search Results - rajesh+ganesan
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System and Method for Online End Point Detection for Use in Chemical Mechanical Planarization
Inventors at USF have developed a system and method for identifying a significant event in a CMP process. This novel method uses a sequential probability ratio test on the wavelet decomposed coefficient of friction (CoF) data from the CMP process. The method is made suitable for online application by developing a moving block data processing strategy,...
Published: 7/17/2024
|
Inventor(s):
Tapas Das
,
Rajesh Ganesan
,
Ashok Kumar
,
Arun Sikder
Keywords(s):
Category(s):
Technology Classifications > Electronics