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Volatile Thermally Stable Transition Metal Precursors for Thin Film Growth
Wayne State researchers have developed a new class of thermally stable, volatile transition chemical compounds that have desirable properties for the growth of thin films of transition metal-containing materials by atomic layer deposition and chemical vapor deposition.Commercial Applications • Microelectronic devices o Automotive applications...
Published: 9/15/2025   |   Inventor(s): Charles Winter, Mahesh Karunrathne
Keywords(s): Batteries, Coatings, Electronics
Category(s): Technology Category > Thin films, Technology Category > Physical Sciences, Technology Category > Other, Technology Category > Materials, Technology Category > Chemicals