Search Results - hydrogen+lyman+alpha+(hla)

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HLA Exposure Tool
Researchers at the University of Arizona have developed an interferometer that operates at 121.6 nm, wherein the sample is outside the vacuum and only the source itself is enclosed in a vacuum. This allows the instrument to be used in lithography without the need to create a large vacuum chamber to hold the sample and instrument during writing or...
Published: 4/3/2023   |   Inventor(s): Thomas Milster, Thiago Jota
Keywords(s): Hydrogen Lyman Alpha (HLA), lithography
Category(s): Technology Classifications > Imaging & Optics, Technology Classifications > Imaging & Optics > Microscopy, Spectroscopy, Polarimetry