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Microwave Process for Improved Optical & Electrical Properties in TCO Semiconductors
Transparent conductive oxide (TCO) layers are an important component of semiconductors within a number of electronic devices including solar cells, touchscreens, and light emitting diodes. Currently, indium tin oxide (ITO) is the most commonly used TCO material due its high electrical conductivity and high optical transparency. However, ITO lacks transparency...
Published: 2/23/2023   |   Inventor(s): Terry Alford, Aritra Dhar
Keywords(s): Electrical Properties, Microwave, Mixed Oxides, Optical, Semiconductor Processing
Category(s): Semiconductors, Materials & Processes