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Fabrication process for creating functional nanostructures on sapphire and other hard optical ceramics
Background Achieving precise high-aspect-ratio nanostructures on hard optical materials presents significant technical hurdles due to the intrinsic properties of these substrates, such as sapphire’s high hardness, chemical stability, and thermal tolerance. Traditional fabrication methods often struggle with generating uniformly patterned, tall,...
Published: 4/4/2025   |   Inventor(s): Chih-Hao Chang, Kun-Chieh Chien
Keywords(s):  
Category(s): Physical sciences, Physical sciences > Aerospace, Computer > Semiconductors > Semiconductor materials